<p>Lecture, four hours; discussion, one hour; outside study, seven hours. Requisite: course 2. Principles of integrated circuits fabrication processes. Technological limitations of integrated circuits design. Topics include bulk crystal and epitaxial growth, thermal oxidation, diffusion, ion-implantation, chemical vapor deposition, dry etching, lithography, and metallization. Introduction of advanced process simulation tools. Letter grading.</p>

Electrical and Computer Engineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

Electrical and computer engineering continues to make vital contributions to expand access, processing, and control of the vast amount of information and data in the world.

General Catalog

Integrated Circuits Fabrication Processes

ECENGR222

4 units