<p>Lecture, three hours; discussion, one hour; outside study, eight hours. Recommended preparation: Electrical Engineering 221B. Requisites: courses 130, 131, 200, 221, 222. Selected topics in materials science from modern Si-CMOS technology, including technological challenges in high k/metal gate stacks, strained Si FETs, SOI and three-dimensional FETs, source/drain engineering including transient-enhanced diffusion, nonvolatile memory, and metallization for ohmic contacts. Letter grading.</p>

Materials Science and Engineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

Materials engineering is concerned with the design, fabrication, and optimal selection of engineering materials that must simultaneously fulfill dimensional, property, quality control, and economic requirements.

General Catalog

Si-CMOS Technology: Selected Topics in Materials Science

MATSCI226

4 units