<p>Lecture, four hours; outside study, five hours. Enforced requisite: course 101C. Enforced corequisite: course 104CL. Basic engineering principles of semiconductor unit operations, including fabrication and characterization of semiconductor devices. Investigation of processing steps used to make CMOS devices, including wafer cleaning, oxidation, diffusion, lithography, chemical vapor deposition, plasma etching, metallization, and statistical design of experiments and error analysis. Presentation of student results in both written and oral form. Letter grading.</p>

Chemical Engineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

The department conducts teaching and research that focus on the areas of biomolecular engineering, systems engineering, and advanced materials processing; and span the general themes of energy/environment and nanoengineering.

General Catalog

Semiconductor Processing

CH ENGR 104C

3 units