<p>Lecture, four hours; outside study, eight hours. Designed for graduate chemistry or engineering students. Application of chemistry, physics, and engineering principles to design and operation of plasma and ion-beam reactors used in etching, deposition, oxidation, and cleaning of materials. Examination of atomic, molecular, and ionic phenomena involved in plasma and ion-beam processing of semiconductors, etc. Letter grading.</p>

Chemical Engineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

The department conducts teaching and research that focus on the areas of biomolecular engineering, systems engineering, and advanced materials processing; and span the general themes of energy/environment and nanoengineering.

General Catalog

Plasma Chemistry and Engineering

CH ENGR 234

4 units