<p>Lecture, four hours; outside study, eight hours. Requisites: courses 210, C216. Chemical vapor deposition is widely used to deposit thin films that comprise microelectronic devices. Topics include reactor design, transport phenomena, gas and surface chemical kinetics, structure and composition of deposited films, and relationship between process conditions and film properties. Letter grading.</p>

Chemical Engineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

The department conducts teaching and research that focus on the areas of biomolecular engineering, systems engineering, and advanced materials processing; and span the general themes of energy/environment and nanoengineering.

General Catalog

Chemical Vapor Deposition

CH ENGR 236

4 units