Description
(Same as Bioengineering M250B and Electrical and Computer Engineering M250B.) Lecture, three hours; discussion, one hour; outside study, eight hours. Enforced requisite: course M183B. Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials … For more content click the Read More button below.