Microelectromechanical Systems (MEMS) Fabrication

MECH&AE M280B - Microelectromechanical Systems (MEMS) Fabrication

EC ENGR M250B - Microelectromechanical Systems (MEMS) Fabrication

<p>(Same as Electrical and Computer Engineering M250B and Mechanical and Aerospace Engineering M280B.) Lecture, three hours; discussion, one hour; outside study, eight hours. Enforced requisite: course M153. Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress. Letter grading.</p>

Bioengineering

Known as the birthplace of the Internet and where countless other cutting-edge technologies took their first steps, the school is consistently ranked among the top 10 public engineering schools in the U.S.

Henry Samueli School of Engineering and Applied Science

The department has created state-of-the-art facilities for cutting-edge research and developed an innovative curriculum for the education of the next generation of bioengineers.

General Catalog

Microelectromechanical Systems (MEMS) Fabrication

BIOENGR M250B

4 units