Microelectromechanical Systems (MEMS) Fabrication

Description

(Same as Electrical and Computer Engineering M250B and Mechanical and Aerospace Engineering M280B.) Lecture, three hours; discussion, one hour; outside study, eight hours. Enforced requisite: course M153. Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in … For more content click the Read More button below.

(Same as Electrical and Computer Engineering M250B and Mechanical and Aerospace Engineering M280B.) Lecture, three hours; discussion, one hour; outside study, eight hours. Enforced requisite: course M153. Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress. Letter grading.

Instructional Format

Primary Format

Lecture

Secondary Format

Discussion

Additional Format

Outside study

Multiple-Listed Courses

Multiple-listed courses are courses offered jointly by more than one department.

General Catalog 2023-24